| Onishi, M and Hugrass, W, Light Source Device for Semiconductor Lithography (2012) [Patent] |
| Data Type | Value |
|---|
| Type of Research | Applied Research |
| Research Division | Physical Sciences |
| Research Group | Nuclear and plasma physics |
| Research Field | Plasma physics; fusion plasmas; electrical discharges |
| Research Objective Division | Manufacturing |
| Research Objective Group | Computer, electronic and communication equipment |
| Research Objective Field | Integrated circuits and devices |
| Visit Item on eCite | http://ecite.utas.edu.au/79506 |
